Used HIKE DJ1223V CX3 #9262170 for sale

HIKE DJ1223V CX3
ID: 9262170
Wafer Size: 12"
Vintage: 2006
Diffusion systems, 12" 2006 vintage.
HIKE DJ1223V CX3 Diffusion Furnace is a fully integrated vertical diffusion furnace that is designed for high performance process development and production activities. It is equipped with a variety of features that increase the speed and accuracy of the diffusion process. The furnace is built with multiple layers of metal plates, two separate chambers, and three independently operated load locks for maximum efficiency. The top chamber of the furnace is the drive chamber, which houses the patented HIKE drive rod equipment. The drive rod system is composed of four rods which are connected to the furnace chamber and allow complete control over the temperature used in the diffusion process. This drive unit is designed to provide optimum efficiency during operation and is easily adjustable to process different materials and temperatures. The load locks on DJ1223V CX3 are operated via an integrated programmable logic controller (PLC). The load locks feature three isolated chambers to insert and remove wafers or substrates from the furnace without contamination of the process chamber. Each of the three chambers can handle up to 6" x 6" wafers and are individually programmable for high accuracy control during the diffusion process. The bottom chamber of the furnace is home to the resistive heating element, which maintains uniform heating of the furnace with a maximum temperature of 1300°C. The element is capable of sustaining a process temperature of between 15 and 400°C, with accurate temperature control over all process steps. The heated air is then circulated throughout the furnace chambers via a blower fan machine that provides uniform temperature across the sample surface for a precise and repeatable diffusion process. HIKE DJ1223V CX3 Diffusion Furnace is capable of a variety of process cycles for process development and production activities. It also comes with several features that aid in process monitoring, including a chromel-alumel thermocouple for temperature control, an integrated quartz halogen chamber light for easy viewing of the load locks, and a built-in wafer mapping feature. All of these features make DJ1223V CX3 a robust and powerful diffusion furnace that can be used in a variety of applications.
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