Used KOKUSAI DD-803V-H #9248596 for sale

KOKUSAI DD-803V-H
ID: 9248596
Wafer Size: 8"
Vertical diffusion furnaces, 8" Process: WET-OX.
KOKUSAI DD-803V-H is a diffusion furnace and accessories designed to provide advanced capabilities for wafer processing in a variety of related markets such as semi-conductor, MEMS, and other thin film production fields. It is particularly designed for use in the semiconductor fabrication process and the latest low-pressure technology enables it to support the production of sharper lines and circuits for optimal performance. This diffusion furnace is made from robust stainless steel materials, with a triple heater assembly consisting of 3 electric heaters with a total power rating of 36kW produced from a 220v, 15A, 60Hz single phase source. The heating elements are controlled via PID temperature controllers with a temperature range of 8°C to 800°C. The furnace also features a large working space able to house eight 6 inch wafers and four 8 inch wafers with a total size of 350x350x550 mm. DD-803V-H is equipped with features to ensure high-quality results and maximum operating performance. An exhaust equipment is developed with nozzles that enables removal of poisonous, explosive and harmful vapors such as hydrofluoric acid, boron, chlorine, nitrogen and acetylene gases. It also stops gas contamination with an intake filter. This allows the device to perform uniform diffusion while avoiding chemical damage to the wafers. KOKUSAI DD-803V-H is also fitted with a temperature uniformity monitor. This is specially designed to measure, control and adjust the temperature of the inside furnace to ensure the uniformity of the temperature, and therefore a high quality of processes. Additionally, it features an integrated vacuum system that can achieve a maximum vacuum degree of 7X10-2 Torr. DD-803V-H is designed with high safety measures, including a temperature safety control unit which can prevent overheating with an overtemperature protection machine. Also, it is installed with an emergency stop button that guarantees safety while the device is operating. KOKUSAI DD-803V-H represents a high level of product innovation and reliability for semi-conductor and thin film production processes. It is a comprehensive and efficient solution providing substantial cost savings over the long term, thus ensuring your projects are completed on time and with high quality results.
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