Used KOKUSAI DD-853V #293615302 for sale

KOKUSAI DD-853V
ID: 293615302
Wafer Size: 4"
Vintage: 2012
Vertical LPCVD Furnace, 4" 2012 vintage.
KOKUSAI DD-853V is an advanced-grade diffusion furnace, used for the insertion and/or removal of elements onto and/or from a variety of substrates including silicon and silicon-based materials. As one of the market-leading diffusion furnaces, the versatile KOKUSAI DD 853V serves many types of single-wafer processing and advanced temperature-programmable applications. DD-853V is equipped with a Direct N2 Implantation gas box module, which allows implantation at temperatures of up to 550°C, and a maximum 90-seconds of cooling between processes. It also features a user-friendly touch-screen interface for simple and direct commands, as well as a range of optional 'add-on' accessories such as ion shutter, high temperature insulation plates, multiple boat monitors and standard SI-valve. Additional features include its high throughput capability, high temperature durability, flexible configuration, and a low chemical activity furnace wall. It also provides a sophisticated automation system with fast, reproducible device recipes and easy maintenance. The integrated internal gas safety system is capable of an accurate gas mixtures and control. The compact design enables the flexibility to locate the device within many different processing environments, and makes it suitable for both single-wafer and multi-wafer process platforms. As with all KOKUSAI products, DD 853V is designed to provide highest productivity in the most cost-effective manner. By allowing the user to cascade multiple recipes to process a wide variety of materials and substrates, with fast throughput and low cost of ownership, KOKUSAI DD-853V is the ideal choice for industrial, automotive and consumer product development applications. It is also ideal for applications such as multi-stacked layers and vertical integrated circuits, and for some medical applications. For total control of the diffusion process, KOKUSAI DD 853V can be equipped with an advanced process control system. This includes features such as automated calibration, fast thermal cycle back-up, automatic process operation monitoring and data acquisition, as well as a remote monitoring and operation capability via Internet. KOKSUAI stands behind DD-853V with a two-year limited manufacturer-warranty, and a wide range of additional services, product modifications, maintenance contracts, high-quality spare parts and technical support. An R&D version of DD 853V is also available, which allows users to readily perform directed experiments. With its powerful performance and high-precision results, KOKUSAI DD-853V is a reliable, long-term solution for any budget-conscious diffusion-processing requirements. Its innovative design, structured modular configuration and impressive array of advanced features make KOKUSAI DD 853V an ideal choice for businesses seeking an efficient, high-throughput diffusion furnace for their needs.
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