Used TEL / TOKYO ELECTRON A303i #9235193 for sale

TEL / TOKYO ELECTRON A303i
ID: 9235193
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnace, 12" Process: DIFF 2003 vintage.
TEL / TOKYO ELECTRON A303i is an advanced diffusion furnace equipment for use in integrated circuit fabrication. The system consists of two components: a diffusion furnace chamber and associated processing equipment. The diffusion furnace chamber is designed to be both air and vacuum tight and is capable of temperatures up to 1550 degrees Celsius. The unit is equipped with a special atmospheric control machine to maintain the desired atmosphere for processing. The chamber is made from two shells made of stainless steel, titanium or niobium. The interior of the chamber is plated with a ceramic coating. This coating contains titanium carbide nanofilms and is designed to prevent oxidation during processing. The chamber is also equipped with quartz windows to allow for the transmission of light used to monitor the progress of processing. The diffusion furnace tool also includes a number of accessories that allow for further processing. These accessories include extension arms, shutters, probe assemblies, edge-sealing plates, scrape-down resins and heating elements. The probe assemblies allow for precise manipulation and application of resins to the inner Chamber. An inert gas supply line is connected to the chamber as an additional safety measure. The edge-sealing plates are attached to the chamber opening and are designed to reduce contamination from outside sources. The scrape-down resins are used to reduce contamination from adhesion of material on the chamber walls. The heating elements are used to evenly heat the chamber and maintain a consistent environment for processing. TEL A303i is an exceptionally reliable and easy to use diffusion furnace asset. It is designed for fabrication of advanced integrated circuits and other specialized microelectronic components. It is a robust model designed for a long useful life and low maintenance requirements.
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