Used TEL / TOKYO ELECTRON A303i #9271020 for sale

TEL / TOKYO ELECTRON A303i is a state-of-the-art diffusion furnace and accessorie designed to maximize thermal processing efficiency and quality of your semiconductor manufacturing processes. TEL A303i is excellent for brittle-film, RTP, PAE, ALD, encapsulation, and SiC oxidation processes. It is suitable for a variety of applications, from ultra-high throughput prototyping to suite configuration for production. TOKYO ELECTRON A 303 I has a base furnace assembly with alumina coated load ports for the rapid and safe loading/unloading of wafers. The load ports are lined with recessed electrostatic chuck shields to improve uniformity. The wafer loader is capable of transferring up to 200 4-inch, 150 6-inch, and 80 8-inch wafers in one cycle. The chuck plate is also designed with heaters for uniform temperature control. A303i is equipped with a temperature controller with fully- programmable exhaust temperature control and automatic exhaust control. The air-cooled pyrometer enables precise temperature measurements. It also features a closed-loop processing feedback loop system, where feedback from various sensors is used to maintain process parameters and quality. The furnace has an advanced software interface for data analysis and parameter adjustment. Parameters like temperature, time, gas flow, and pressure can all be adjusted in real-time with the help of a touch-screen control panel. The software also includes a real-time data viewer to view process parameters and help with troubleshooting. TOKYO ELECTRON A303i also offers its users additional features like differential pumping to reduce gas load fluctuation, a "rapid cooldown" option to rapidly cool down the chamber, dual zone temperature control, and a process-controlled heat ramp for safe temperature ramping. In terms of safety, TEL A 303 I has UL and CE Certifications, allowing it to be used safely in most production environments. The machine also features an acid-proof stainless steel framework and durable quartz seals to prevent any corrosion or leakage. TEL / TOKYO ELECTRON A 303 I is an ideal tool for a variety of thermal processes. It offers excellent process uniformity, high throughput, precise temperature control, and process data analysis capabilities to make sure your semiconductor manufacturing needs are met in the most efficient way.