Used TEL / TOKYO ELECTRON A303i #9315049 for sale

TEL / TOKYO ELECTRON A303i
ID: 9315049
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnace, 12" 2003 vintage.
TEL / TOKYO ELECTRON A303i is a high-temperature diffusion furnace with a range of accessories that enable users to produce structures with excellent electrical properties. TEL A303i is ideal for the fabrication of high-performance devices. Its advanced design allows for superior temperature uniformity. TOKYO ELECTRON A 303 I boasts a maximum temperature of up to 1800°C and features an independent crucible-pole construction and an action type of atmosphere system. This diffusion furnace includes a gas supply panel to reduce chilling time. It has two PENN-STYLE™ furnaces with a loading capacity of up to 235mm (9.25"). The precise temperature control ensures repeatable and optimal results. A 303 I features a variety of accessorie to enhance users' efficiency and productivity. A precursor feeding system can be used to supply either an organic or inorganic powder as a precursor. A rapid thermal oxidizer (RTox) module can be attached to enable high area throughput and the production of high quality oxide films. TEL / TOKYO ELECTRON A 303 I also includes a programmable electronic controller (PEC) to ensure reliable repeatable device processing. It features an easy-to-use touchscreen and an integrated nichrome strip control to achieve uniform temperature distribution. The PEC also includes feedback control and allows up to 30 programs to be stored as a recipe. In addition, A303i includes advanced diagnostic features that ensure maximum uptime. It has an on-board mass flow controller (MFC) to provide an accurate and stable gas flow and a thermal couple warm-up feature to minimize cool down times. The furnace is also equipped with an emergency shutoff valve and an integrated safety interlock system. TEL A 303 I provides precision temperature control and advanced features to help users streamline their production and quickly reach maximum yields. With its wide range of accessories, TOKYO ELECTRON A303i can be customized to meet a variety of applications.
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