Used TEL / TOKYO ELECTRON Alpha-303i Anneal #9253025 for sale

ID: 9253025
Wafer Size: 12"
Vintage: 2005
Vertical anneal furnace, 12" 2005 vintage.
TEL / TOKYO ELECTRON Alpha-303i Anneal is a state-of-the-art diffusion furnace designed to meet the needs of industry professionals. This advanced furnace provides precise and reliable diffusion by utilizing inert gases, high-temperature annealing operations, and a process controller to monitor and adjust the temperature of all anneal operations. The device features a high-performance and accurate feedback equipment in order to maintain consistent heating and cooling temperatures. This feedback system is particularly helpful when performing complex processes, including rapid thermal processing and pulse annealing. The user can select the desired annealing temperature and pressure from a wide range of parameters, and the built-in process controller will automatically adjust the settings according to the operation to ensure accuracy. In addition to precise anneal operations, the Alpha-303i also offers durability and safety. It is constructed of a lightweight and thermally conductive aluminum which not only ensures reliability but also reduces the risks of overheating and fire risks. The sealed inert gas chamber also ensures that the furnace is free from combustible gases. Additional safety features include an alarm unit that is triggered when an incorrect setting is entered, a gas pressure safety valve to prevent overpressure in the chamber, and advanced temperature insulation to protect the device from temperature fluctuations. The Alpha-303i is capable of achieving a temperature of up to 1500 degC with a temperature uniformity of ±1%. In addition, it is able to perform a number of additional operations, including wafer annealing, epitaxial deposition, dopant-stabilized processes, and many more. These operations can be completed with a variety of different cycle times and can be viewed on the controller's 7-inch touch-screen display. Finally, the Alpha-303i is complete with several extras, such as a process gas exhaust machine, door interlock safety feature, and a chamber water-cooling tool. This advanced model also supports both manual and automated control operations, and users can utilize a variety of device configurations to suit their specific needs. Ultimately, TEL Alpha-303i Anneal is a superior diffusion furnace asset capable of completing a wide range of annealing operations in an efficient and reliable manner.
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