Used AMAT / APPLIED MATERIAL P5000 #293656948 for sale

AMAT / APPLIED MATERIAL P5000
ID: 293656948
CVD System (3) Chambers, 8".
AMAT Applied Materials AMAT / APPLIED MATERIAL P5000 Asher/Etcher is a versatile tool suited for a variety of high-precision process applications in numerous industries. This equipment provides superior precision and stability while delivering efficient throughput, enabling users to achieve consistent, high-quality results. AMAT P5000 features three process chambers - one for pre-clean, one for etch, and one for post-clean. Each process module is equipped with independent pressure and temperature controls, as well as both in-situ and ex-situ monitoring capabilities, allowing users to optimize the process. The chambers are temperature controlled via a built-in chiller and a precise thermal PID loop. Additionally, an advanced pressure control system is in place, for improved steady-state uniformity and accurate process optimization. APPLIED MATERIAL P5000 is capable of a wide range of deposition techniques, such as Electron Cyclotron Resonance (ECR) etch, high-density plasma etch (HDPE), reactive ion etch (RIE), cryogenic deep plasma etch (DPE), and multi-step etching for advanced process recipes. In addition, the unit supports a wide range of etchant gases, making it a great choice for applications in advanced logic and memory devices, interconnects, MEMS devices, and more. P5000 has several advanced features that make it stand out from other etch/asher systems. The tool's advanced integrated automation capabilities reduce user involvement in setup and process recipes, making it an ideal choice for larger production needs. An integrated interlock verification machine monitors all critical tool parameters in real-time and provides the user with detailed feedback to ensure reliable and repeatable results. AMAT / APPLIED MATERIAL P5000 also offers advanced process monitoring capabilities to ensure accurate process optimization. This includes in-situ and ex-situ optical observation, as well as a built-in spectrometer, for verifying critical process parameters during the recipes. Furthermore, the tool incorporates a real-time electrical monitoring asset that protects against any type of over-etching or under-etching. Overall, APPLIED MATERIAL/Applied Materials AMAT P5000 Asher/Etcher is an ideal choice for process applications which require superior performance and accuracy. Its advanced features, such as integrated automation and process monitoring capabilities make it ideal for production processes, and its wide range of deposition and etching techniques make it exceedingly versatile. The model is also easy to operate and maintain, further improving its effectiveness in the production environment.
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