Used BROOKS AUTOMATION 001-8200-89 #293664916 for sale

ID: 293664916
Load lock chamber.
BROOKS AUTOMATION 001-8200-89 is an etcher / asher, a piece of equipment used in the fabrication of high-tech microelectronic products. It is an important piece of machinery in the semiconductor industry as it produces etching and/or ashing of patterned substrates such as thin films, silicon wafers and polymers. The 8200-89 is designed to meet both semiconductor and packaging needs. The 8200-89 has a number of distinct advantages over manual etchers. It features an automated platform with a host of options, including automated substrate loading and a plethora of peripheral and command control systems. In addition, the 8200-89 is capable of processing more substrates in a given timeframe than manually driven systems. This makes it ideal for high-volume batch processing. The 8200-89 is a highly configurable equipment. It is capable of producing etchings of varying shapes and sizes, ranging from 0.5μm to 20μm. The corrosive environment of the etching process is contained and controlled within the enclosed system. The unit also features temperature and pressure controls which allow for precise and reproducible processing of substrates. In addition to its precision etching capabilities, the 8200-89 also offers a wide range of features related to production control and monitoring. It features an integrated data entry and recall machine for easy monitoring and record keeping. Furthermore, the unit offers process monitoring via online and offline data loggers. This data can be transferred to other systems for evaluation and troubleshooting purposes. The tool is equipped with safety features, including a number of safeguards to protect personnel and Product. In addition to the open-vented design, the 8200-89 is designed to meet UL, CSA, and NEC safety regulations to ensure protection. To maintain optimal performance, the machine is also equipped with automatic cleaning systems and warning systems which alert personnel in the event of an impending hazard. The design of the 8200-89 is based on established industry principles, such as ease of use, reliable performance, and ease of maintenance. The integrated design ensures that the asset is easy to operate, and allows for efficient servicing and repair if needed. This makes the 8200-89 an ideal choice for high-volume production and the development of high-tech microelectronics.
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