Used CORIAL 300 iL #9272940 for sale

CORIAL 300 iL Endpoint Etcher/Asher is a precision batch asher designed for the wafer etching and stripping industry. 300 iL is an automated, fully-encapsulated, low-vibration, and low-gas thermal device, capable of very tight process control of etching and cleaning materials. The equipment features a centrally-located patented multidirectional nozzle system and a large-capacity SiC heater. CORIAL 300 iL Endpoint Etcher/Asher offers a number of features which have been designed to increase the throughput and quality of processes on the device. The unit is capable of providing an extremely repeatable endpoint, with a possible error as low as 0.1μm/cm. With 8 programmable zones and up to 10 process recipes stored in memory, 300 iL offers a level of flexibility and precision which is unmatched by traditional batch ashers. The machine also offers the possibility for temperature uniformity of ± 2°C across the substrate, and a temperature range of 2°C to 200°C. The process gases which can be used within CORIAL 300 iL range from Nitrogen, Argon, Formic acid, and Acetone, amongst others. The tool is equipped with an inert gas supply and purge mechanism which ensures that the asset is flushed with fresh gas for each process recipe, thus providing the highest level of contamination control. 300 iL also features a number of safety features, including emergency stop, gas and power switch off, and a low voltage, high current temper-shutoff switch. The model also features audible and visual alarms to warn the operators of any alarm conditions. The equipment is constructed of durable CERTACHROM stainless steel, and is also highly configurable. A variety of wafer holders can be installed on the system, and the unit can be integrated into a customer's existing infrastructure using CORIAL 300 iL's Ethernet connections. In conclusion, 300 iL Endpoint Etcher/Asher provides a flexible, high-precision and safe solution for the etching and stripping industry. With its excellent precision, repeatability and temperature control, CORIAL 300 iL is excellent for any process requiring controlled, localized or multi-step etching or stripping.