Used DIONEX 2000 #9096845 for sale

DIONEX 2000 is an etcher/asher specifically designed for ultra-low-temperature etching and ashing of metal components in semiconductor fabrication. This equipment is capable of maintaining temperatures from -180°C to +1600°C and features a host of process control options such as multi-level temperature zones, gas flows, pressure control and gas purge capabilities. The main components of the system include a vacuum chamber, pump and scrubber, process electrodes, heater and controllers, a pump-off process control, a cooling device and other hardware components. The unit also features a computer-controlled display for monitoring the process parameters and a data acquisition machine for logging temperature, pressure and other values for each process. The vacuum chamber is equipped with gas inputs, electrodes, and graphite boat which allow for the efficient loading of substrates and inspection of sample engineering. The process electrodes facilitate the etch or ash process while the heater provides a uniform temperature profile. The cooling device keeps the temperature of the chamber constant. The control tool of 2000 allows for a high degree of precision when it comes to temperature accuracy and control. The multiple temperature zones provide a precise control profile across the chamber, allowing different temperature profiles to be programmed as desired. The chamber pressure can also be finely controlled and the chamber can be purged with inert gases as needed. The chamber is also equipped with a number of safety features including emergency stop controls and gas purging options. In addition, the asset is designed to meet the safety requirements of the International Standards Organization and the European Union. DIONEX 2000 is the ideal choice for applications requiring ultra-low temperature etching and ashing of metals. Its intelligent control model ensures accurate temperature control and pressure levels, making it an extremely reliable equipment for semiconductor fabrication. Its safety features, high performance and easy operation make it an ideal choice for all types of etching and ashing processes.