Used EUROPLASMA CD1000 Nanofics #9311808 for sale

EUROPLASMA CD1000 Nanofics is a dry etching and ashing system specifically designed for semiconductor micromachining applications. It combines high-precision air and reactive gas plasma processing in one unit to achieve an ultra-thin, uniform etching profile with tight feature control. CD1000 Nanofics is equipped with a dual-level mass flow controller which allows accurate, automated etching and ashing rate and pressure adjustment. This provides improved process repeatability and a more precise etch/ash profile. It is also equipped with a low-pressure RF power generator which allows the system to reach higher plasma densities and ion energies at lower pressures. This gives it the ability to etch materials at very low temperatures to minimize thermal damage and achieve a more uniform etching result. EUROPLASMA CD1000 Nanofics is an open-source platform, allowing users to customize and program their own plasma processes. It is designed for a wide variety of materials, including Si, SiO2, SiN, SiC, GaN, and organic dielectrics. It can etch or ash down to a thickness of 10nm or below, with feature sizes as small as 50nm. It is capable of etching and ashing at both atmospheric and reduced pressures, and can reach temperatures as low as -60°C. It also features an automated in-situ substrate holder for sub-100nm feature etching. The holder reduces micro-loading and allows for more repeatable and accurate features. Overall, CD1000 Nanofics is an advanced etching and ashing system designed for fast, precise micromachining of a variety of materials. Its combination of low temperature, low-pressure plasma technology, low thermal damage, and repeatability has revolutionized semiconductor etching and ashing applications.