Used EUROPLASMA CD400 #9105430 for sale

Manufacturer
EUROPLASMA
Model
CD400
ID: 9105430
Plasma system (4) Shelf unit with shelves 305 x 360 mm.
EUROPLASMA CD400 is a A-Series Plasma Etcher/Asher ideal for use in a broad spectrum of process applications. With its low cost and high throughput, CD400 is an excellent choice for laboratories, university research & development centers, semiconductor and MEMS manufacturers seeking the ultimate in performance and precision. EUROPLASMA CD400 utilizes an advanced couplant/coolant equipment to remove contaminants from the sample surface under vacuum. This system uses a patented, ceramic-like, plasma-reflection membrane to prevent particles from entering the reaction chamber. The process is applied over a wide temperature range, ensuring uniform processing and precise results. The reaction chamber of CD400 is equipped with temperature-independent E-gun arrays, enabling the submicron layer-by-layer etching and ashing of metals, oxides, nitrides, and polymers.The E-gun arrays provide an adjustable dwell time, allowing for the optimization of etching processes to meet specific performance requirements. The adjustable dwell time also enables users to select different process recipes for different materials, simplifying the process optimization process. EUROPLASMA CD400 is able to deliver features with sizes down to 0.1 µm, depending on the etching parameters. Sub-micron features are achieved by the difference in etching and ashing speeds of different materials. CD400 also offers high throughput, as the etching time can be reduced. Furthermore, EUROPLASMA CD400 is able to deliver a broad range of process parameters, allowing users to optimize their processes for the best performance. CD400 is also one of the most energy-efficient units in its class, as the heated substrate cups are designed to converse energy. The unit also features an active flow stabilization, providing a stable process gas supply without the need for pressure control. This reduces energy consumption and also ensures a high level of reproducibility. To increase safety, EUROPLASMA CD400 includes a Safety Monitor that uses fail-safe limit sensors and automatic shut off. The Safety Monitor continuously monitors the process parameters, ensuring safety and compliance with local regulations. CD400 is an excellent choice for a wide variety of etching and ashing process applications. Its combination of advanced technology, user-friendly features, and high-performance capabilities make it an ideal machine for any research and development laboratory or production line.
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