Used LAM RESEARCH 4520 #9145513 for sale

LAM RESEARCH 4520 is a robust plasma etcher / asher designed for production of semiconductor devices. This equipment is equipped with a single chamber, allowing for efficient and repeatable etch processes. The process chamber features a diamond-metal hybrid shield design and is capable of both low- and high-power applications. 4520 has digital controllers where parameters such as plasma power, temperature, and pressure can be adjusted and stored. This etcher is controlled via a PC connected via Ethernet and allows for user-friendly programming and onboard recipe development. As an added safety feature, LAM RESEARCH 4520 has an integrated safety system that allows a remote shutdown of the unit when an alarm is triggered. 4520 has a range of accessories to improve etch processes, including a remote diagnostics tool, an inert gas recirculation machine, and an automatic wafer transport tool. Additionally, the asset has an automated end-point detection model to ensure consistent wafer processing and repeatable results. LAM RESEARCH 4520 makes use of either halogen or nitrogen-based plasma chemistry for etching. It has a wide range of materials which it can etch, including polymers, SiO2, Si3N4, PECVD layers and metal layers. The equipment can also etch copper at a rate of up to 1000 angstroms per minute. In addition to etching capabilities, 4520 can also be used for high-aspect ratio and anisotropic etching. It also offers back-side lapping and trenching functionality which can be used for improved device processing. Overall, LAM RESEARCH 4520 is a flexible and reliable etcher / asher system, and is the perfect choice for producing semiconductor devices at the highest quality. This unit is robust and user-friendly, ensuring repeatable and consistent results, making it ideal for high-volume production applications.