Used MARCH AP 1000 #9409427 for sale

Manufacturer
MARCH
Model
AP 1000
ID: 9409427
Vintage: 2009
Plasma cleaner 2009 vintage.
MARCH AP 1000 Asher is an automated wafer etcher/asher featuring a platform equipped with two independent gas panels and four temperature zones. It is used to process wafers of up to 6 inches in size, in accordance with user-defined parameters. The equipment's gas panels can operate with up to twentyfour different gases, and each employ independently controlled viewing windows. This allows for monitoring the etching process in real time. MARCH AP1000 is designed with a state-of-the-art scanning capability and is equipped with an advanced vision system to ensure accuracy during the etching process. This unit uses a focused electron beam that is synchronized with an optical imaging machine that allows it to precisely target the material to be etched. An integrated wafer motion tool ensures speed and accuracy by allowing the wafer to move within the etcher in order to evenly distribute the etching process. The four temperature zones enable the etcher to better control the thermal processes, with each independent zone capable of heating up and cooling down with a range between 0°C and 400° C. This allows AP-1000 to apply different temperatures to different wafers. Additionally, AP1000 also includes an automatic flooding/purging asset to provide a clean working environment. MARCH AP-1000 is an indispensable tool for automated and accurate etching operations. This model offers a collection of advantages and features such as adjustable gas pressure and temperatures, independent zone temperature control, and efficient scanning and imaging capabilities. This equipment enables users to control the etching process thoroughly and efficiently, ensuring precision and repeatability in producing wafers with predetermined patterns.
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