Used MARCH PX-1000 #293647792 for sale

Manufacturer
MARCH
Model
PX-1000
ID: 293647792
Plasma cleaner RF Generator, 1000 W.
MARCH PX-1000 is an etching/ashing equipment used in semiconductor fabrication. It is an advanced plasma etching and stripping tool specifically designed to rapidly etch and remove metals, polymers, oxides, and other materials. MARCH PX 1000 employs multiple technologies and optimized process parameters to achieve high quality results while maintaining a high throughput rate. PX-1000 integrates both high density plasma etching and physical stripping processes into its etching system, allowing for the etching of materials with a higher selectivity than with other etching systems. It also offers accurate control over various etching parameters for optimal process control and material removal rates. With its integrated computer control unit, PX 1000 can precisely monitor, measure, and adjust process parameters such as gas flow rate, pressure, temperature, and pressure ratio. MARCH PX-1000 also offers a variety of features, including a powerful automated recipe control machine, advanced real-time end point detection tool, and dual-stage plasma cleaning capability that helps to extend the lifetime of the process chamber. With its multiple chamber and sink design, MARCH PX 1000 provides optimal flexibility and process stability. In addition, its advanced vacuum asset maintains a high-quality atmosphere and allows for a range of different vacuum levels. PX-1000 is ideal for a variety of applications ranging from wafer-level etching of thin metal and dielectric layers, thin-film metal lift-off, and metal surface shaping to high-aspect ratio etching of thick metal, metal removal, and passivation of transistors. With its advanced etching and stripping capabilities, PX 1000 is highly effective and reliable for many of today's modern semiconductor fabrication processes.
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