Used MARCH PX-1000E8 #9145023 for sale

MARCH PX-1000E8
Manufacturer
MARCH
Model
PX-1000E8
ID: 9145023
Vintage: 2000
Plasma cleaners 2000 vintage.
MARCH PX-1000E8 is an fourth-generation etcher/asher. It is a reliable, precision equipment engineered to provide superior etching and ashing quality and performance. It is suitable for a wide range of applications in the semiconductor industry, including etching and ashing of silicon, III-V materials, and microelectronic interconnects. MARCH PX 1000E8 features a powerful, low-pressure, ultra pure, chemical etching and ashing system. The unit features an integrated high-temperature resistive etching and ashing chamber, a high-resolution, low-noise optical microscope, multiple ports for loading and unloading substrates, an auto-loading mechanism for loading substrates without operator intervention, and a automated control interface that allows for easy programming of process parameters. PX-1000 E8 is designed to provide uniform, controllable etching and ashing while ensuring minimal contamination and dilution of chemical agents. It is equipped with a top-of-the-line mirror coating to reduce chemical absorption and promote uniformity in processes such as subsurface resist etching and ashing. It includes adjustable process parameters (e.g. temperature, flow rate and pressure) as well as bakehouse capabilities, allowing users to quickly and precisely adjust and optimize their processes. MARCH PX-1000 E8 also includes advanced safety features, including automatic safety shut-offs, gas shielding, and internal pressure and temperature sensors. This feature ensures that the machine is always operating within safe parameters and prevents premature damage to the etching and ashing chamber. In addition to etching and ashing, PX 1000E8 can be used for enhanced deposition, resist stripping and narrow band coating. The tool's advanced control interface and automated loading mechanism combine to provide seamless automation of complex etching and ashing processes. MARCH PX 1000 E 8 is an efficient and reliable etching/ashing tool for semiconductor manufacturers who require high-performance processes. Its advanced features and robust safety systems ensure that the asset operates at peak efficiency and consistently delivers superior results.
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