Used MARCH PX-500 #194996 for sale

MARCH PX-500
Manufacturer
MARCH
Model
PX-500
ID: 194996
Vintage: 1999
Plasma cleaner, 1999 vintage.
MARCH PX-500 is an etcher/asher, designed to handle a variety of etching and ashing operations. This device can process aluminum, stainless steel and select composite materials with a wide variety of film types, such as photoresist, shielding and protective films. MARCH PX 500 features a large, heated process chamber that can support multiple panel sizes from small coin size to larger array sizes. The upper panel transfer equipment is designed to move products to and from the heated process chamber. The system includes lift pins, motors and a belt feeders to ensure panel alignment accuracy. The chamber is pressurized with argon or nitrogen gas to ensure uniform etching and ashing. PX-500 also boasts a high-powered etching unit that allows for a very fine resolution of etch, down to 1 micronis. The ashing machine is highly configured, allows for both rapid thermal ashing as well as radio frequency ashing. Both of these processes are designed to achieve the highest-possible wafer cleanliness. PX 500 uses a powerful, high accuracy motion tool in order to precisely position the etch head, as well as the metal shielding mask and ablation mask to the exact part. This results in very exact etching and ashing of the parts. MARCH PX-500 also features a powerful 16-bit microprocessor that controls every aspect of etching and ashing. This includes an intuitive touchscreen interface, recipe programming and comprehensive automation. MARCH PX 500 also has built-in diagnostics, making maintenance and servicing easier and more efficient, ensuring maximum uptime. PX-500 has a robust construction and is backed by a 1-year warranty. It is a reliable and highly efficient etcher/asher that is perfect for a variety of production applications.
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