Used MORY DSV-3000 #9145025 for sale

MORY DSV-3000
Manufacturer
MORY
Model
DSV-3000
ID: 9145025
Vintage: 2003
Plasma cleaner 2003 vintage.
MORY DSV-3000 is an etcher/asher machine, designed to provide flexible and precise etch and ashing capabilities for industrial and laboratory applications. It features an intuitive graphical user interface and automated processes that allow users to quickly and easily adjust parameters and adjust settings to suit their specific needs. DSV-3000 is equipped with two ion beam sources that provide superior ion beam quality, with a beam spot size of 1.4 mm and an ion energy range of 0 to 6 kV. This ensures high-quality etching and ashing. The unit also features an adjustable beam tilt and beam angle control, allowing users to customize etching and ashing processes accordingly. In addition, MORY DSV-3000 includes integrated substrate stage that supports a wide range of substrate materials. This includes silicon, glass, metals, ceramics and polymers. With the substrate stage, users can perform a variety of etching and ashing operations with excellent precision and repeatability. The unit includes full integration with robotic and vision systems to enable unattended operations and automation. Furthermore, the embedded control system provides intelligent processes such as multi-feature alignment, rectified polishing, pre-etch cleaning and device testing. This ensures that each etching or ashing process is conducted to precisely match the user's design intent. The unit uses an XYZ motion system to allow fine positioning adjustment with the substrate stage. DSV-3000 also offers a range of software tools, such as image processing, wafer detection and auto-alignment. These tools make job production and quality management much more efficient and economical. An intuitive touch-screen interface is provided with MORY DSV-3000, making it easy to navigate and adjust process parameters. The unit is designed to meet the most demanding etching and ashing requirements and is fully compliant with CE and RoHS (Restriction of Hazardous Substances Directive) regulations.
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