Used PLASMA ETCH BT-2 #9083265 for sale

PLASMA ETCH BT-2
Manufacturer
PLASMA ETCH
Model
BT-2
ID: 9083265
Vintage: 2003
Plasma cleaner, 2003 vintage.
PLASMA ETCH BT-2 is a high-precision etching platform created by PLASMA ETCH, Inc. that allows for dry etching on a variety of materials and substrates. This workstation is designed with a robust engineering platform that combines accurate repeatability with control and flexibility. Using a combination of high temperatures and high-speed plasma processes, BT-2 can quickly and accurately etch and asher a wide range of materials. The underlying technology of PLASMA ETCH BT-2 is based on a high-density plasma (HDP) etching process. This process uses an asymmetric dual radio-frequency (RF) power supply to deliver highly repeatable power to the plasma. The process is then stabilized by a perpendicular RF bias that is applied to the etch substrate, resulting in high-aspect-ratio structures being formed in the material. The system also offers dynamic ion-energy control between the source and the substrate, enabling precise etch mask definition at the same time as improved etch uniformity through power adjustment. The overall design of BT-2 is modular and compact; its vacuum enclosure is constructed from an anodized aluminum housing, with a stainless steel and aluminum lower chamber and a sealed air chamber. It is designed to be able to fit into any industrial size lab. The chamber is adjustable and allows for both CVD and single-chamber etch processes, making it suitable for a wide variety of applications. Furthermore, the system is fitted with a built-in process interlock system to ensure process repeatability, safety, and quality. PLASMA ETCH BT-2's use of RF power gives it several unique benefits, such as increased etch rate and selectivity, as well as improved material utilization. Moreover, its high thermal isolation ensures a very low power consumption compared to traditional processes, making it an attractive option for low-cost development projects. BT-2's incredible precision also ensures higher accuracy on makings and can produce as precise as 50nm wide lines on ceramic and thin film packages. PLASMA ETCH BT-2 etcher can be tailored to meet the specific needs of any lab or user. It offers comprehensive hardware support, detailed documentation, and customer service for those seeking help with setup and operation. With its powerful, efficient, and reliable design, BT-2 is an excellent solution for any etching and ashing application.
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