Used PLASMA SYSTEMS AMN 3000 #9221265 for sale

ID: 9221265
Vintage: 1983
RF Plasma systems 1983 vintage.
PLASMA SYSTEMS AMN 3000 is a high power, automated etching and ashing machine for precise etching and ashing of various substrates. It is one of the most advanced etching and ashing systems available on the market, and is capable of handling a variety of materials including metals, SiO2, semiconductors, and polymers. The machine provides a high-quality etching and ashing process at a very fast rate, with a repeatability of ± 0.1 μm. The equipment features a load-lock chamber with a process chamber above it, enclosed in a vacuum environment. The process chamber is pressurized and can be adjusted between 0.1 and 500 mbar. Inside the process chamber is a gas injection system, which allows for a precise mixtures of etching and ashing gases. The unit is capable of injecting up to 2000 standard cubic centimeters per minute (SCCM) of etching/ashing gas. An electro-magnetic filter (EMF) is also installed in the machine to filter out any debris and minimize contamination to the tool. AMN 3000 is powered by an advanced embedded computer asset, which contains all of the necessary data logging and machine control capabilities, and is programmable via an intuitive user interface. The model also includes software packages to fully automatically control the etching and ashing process, as well as enhance the etching profile. As part of the process optimization software, the equipment is capable of continually monitoring and adjusting the etching and ashing processes to ensure the best possible results. In addition to the features mentioned above, PLASMA SYSTEMS AMN 3000 also includes a graphical display panel. This panel features a color LCD monitor, providing the operator with graphical representations of both the etch and ashing processes, allowing for better monitoring and control of the machine. AMN 3000 is a versatile and reliable system that is designed to handle a variety of materials and etching processes. With its advanced features and capabilities, it is the ideal solution for any etching or ashing requirements.
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