Used PLASMA SYSTEMS DES 212 #9111271 for sale

PLASMA SYSTEMS DES 212
ID: 9111271
Vintage: 1981
LTA Systems 1981 vintage.
PLASMA SYSTEMS DES 212 is an etcher and asher equipment designed specifically for micro and nano-scale applications. It is a multi-functional system, allowing users to etch, asher, and/or deposit materials in ultra-fine thicknesses. PLASMA SYSTEMS DES-212 consists of the main Processor Unit, which contains a central processor, plus four peripheral units that can be used independent of the Processor Unit. These peripheral units are the spraying head, the PMMA and the Electrostatic Chuck. Each of these units makes a specific function available for processing. The processor unit contains a microcontroller board and a graphical user interface (GUI) that allows the user to easily control the unit. It contains an Ethernet port and video output for ease of use. The software package includes MS Windows compatible software and drivers, plus the circuit designer. The circuit designer allows entry of various parameters, such as etch, asher or deposition type, along with the size and shape of all of the wafers one will be utilizing. The spraying head is designed specifically for etch and asher performances. The nozzle can be rotated for precision control of the process parameters and the temperature can be precisely controlled. This mechanism allows processes such as Metalorganic Chemical Vapor Deposition (MOCVD), Ion Beam Etching (IBE) and Electrostatic Spraying (ESP). The PMMA module supplies a PMMA film to the processing area. The film is heated and cooled off to facilitate the etching and asher processes. The heat and pressure of the processing is precisely controlled by the microcontroller board. The Electrostatic Chuck is used to tightly grip and hold the wafer to the Processing Center. This component is essential for precise control of etching and asher process. The Electrostatic Chuck can also be adjusted to account for the size and shape of different wafers. DES 212 is an excellent solution for those needing precise etching and asher control for processing of ultra-fine materials. The machine has a compact design, and each of its components are robust and reliable for many years of operation. The software and hardware are easily configured and integrate perfectly into any production line. The tool is incredibly easy to use and is suitable for all applications, including micro and nano-scale etching and asher control.
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