Used SAMCO FA-1 #9279755 for sale

SAMCO FA-1
Manufacturer
SAMCO
Model
FA-1
ID: 9279755
Wafer Size: 6"
Vintage: 1996
Etcher, 6" 1996 vintage.
SAMCO FA-1 is a fully automated etching and ashing machine designed for superior substrate cleaning and coating removal. It utilizes a two-step cleaning process utilizing low-temperature oxidation and etching/ashing methods to provide excellent substrate cleaning and coating removal. The oxidation process uses a high frequency, low power electric current to create a uniform oxide layer across the surface of the substrate. The etching/ashing process then works by using a jet of high temperature, high pressure plasma from a vacuum operated plasma source to remove the oxide layer created by oxidation. This method is highly effective at removing oxide from even the most difficult to reach surfaces. FA-1 is capable of etching/ashing on both planar and non-planar substrates at temperatures up to 1000°C. It has a temperature range of 0°C~1000°C and variable cycle times of 20, 40, 60, or 80 minutes. The system also offers a variable etching/ashing pressure range of -1000 ~ 1000 mbar, which makes SAMCO FA-1 ideal for a variety of etching and ashing applications. FA-1 has a chamber size of 60mmx480mm, providing ample space for etching and ashing of substrates of different sizes. SAMCO FA-1 is a fast and effective etching/ashing solution providing excellent substrate cleaning and coating removal. It is a reliable, automated system that works with the highest product performance and safety standards, while being energy efficient. FA-1 is an ideal choice for any etching or ashing application where substrate cleaning and coating removal are needed.
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