Used SAMCO PD-270STA #9055166 for sale

SAMCO PD-270STA
Manufacturer
SAMCO
Model
PD-270STA
ID: 9055166
Vintage: 2001
Sputtering system 2001 vintage.
SAMCO PD-270STA is a high-quality etcher/asher designed for microelectronic fabrication processes. It is a highly efficient and reliable tool that combines plasma etching and reactive ion etching technology. PD-270STA features a variety of advanced features to maximize performance, including a multi-segmental equipment for optimized etching parameters, a high-precision substrate positioning system, and an integrated multi-gas delivery unit. The multi-segmental unit of SAMCO PD-270STA achieves improved etching efficiency and uniformity by allowing users to set optimized etching parameters to each area of the etching chamber. This machine enables users to set operating time, power, gas flow rates, and other parameters for each segment and ensure even etching of the substrate. The highly accurate substrate positioning tool of PD-270STA ensures precise processing of a wide range of substrate materials. The asset is capable of 12-bit high-resolution lateral and 10-bit vertical movement for handling a variety of substrates ranging from 0.008 inches to 6 inches in size. The integrated multi-gas delivery unit is designed to maximize the efficiency of the etching process by providing a precise mixture of reactive gases. The unit ensures uniform distribution of plasma over the substrate in order to enhance etching uniformity. SAMCO PD-270STA is capable of operating at both high and low frequency with plasma power up to 250 watts and etch rate up to 0.7 microns/minute. The device is suitable for use in microelectronics production processes including silicon oxide etching, silicon etching, metal etching, and other processes. PD-270STA is highly reliable and cost-effective etching model designed to save time and money in microelectronics production. Its advanced features make it an ideal tool for various etching processes and applications.
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