Used STS / CPX Multiplex ICP #9363068 for sale

ID: 9363068
PECVD System.
STS / CPX Multiplex ICP is a high-end etching/plasma ashing equipment that has the ability to handle a variety of substrates including silicon oxide and quartz. It features a multi-slot bottom up loader with support for up to 12 substrates and two process chambers. The process chambers feature built-in cooling fans and independent high-frequency power supplies for both etching and ashing. The ashing process provides repeatable results with carbide and quartz substrates. The system is based on the Addison Engineering Advanced Digital Imaging Technology (ADIT).This advanced imaging technology provides a high-resolution image of the substrate at each pass providing precise process control. The unit can be used to etch and asher various substrates such as silicon wafers, metals, quartz on MEMs, LCDs and other specialty materials. It can also be used to etch and asher thin film layers for photolithography processes. The machine features a built-in auto tune feature which can be used to adjust process parameters to ensure repeatable results. The tool also has a built-in computer control asset which can be used to monitor and control the etching and ashing processes from a single location. The model also features safety interlock systems to prevent any potential accidents. STS Multiplex ICP can be used in a variety of industries such as semiconductor, medical device, photovoltaic, LED, and MEMs. The equipment is also compatible with a variety of chemicals including hydrogen fluoride, hydrochloric acid, sulfuric acid, and chlorine-based chemicals. The system is also equipped with safety features that protect users from exposure to dangerous chemicals and fumes. CPX Multiplex ICP is an extremely reliable etching/plasma ashing unit which offers consistent results and repeatability. The machine is easy to use and the automated control features make it simple to monitor and control the process. The tool is a convenient and cost-effective option for etching and ashing a variety of substrates.
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