Used STS / CPX Multiplex #293601086 for sale
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ID: 293601086
Advanced Oxide Etcher (AOE)
Loadlock module, 4"
AOE Chamber module
LEYBOLD Mag-Lev Turbo pump: 2000 L/sec
ICP Chamber.
STS / CPX Multiplex is an etcher / asher which is a computer controlled equipment system for the precise etching and ashing of various types of materials in the semiconductor industry. It consists of two main components; the Substrate Transfer Station (STS) and the Computer-Aided Plasma Etching Process (CPX). STS / CPX is a device used to securely move wafers from the load/unload port, to the asher/etcher chambers. STS consists of a set of electro-mechanical arms, a secure transport module and a tool changer assembly. The arms are designed to secure a wafer by clamping it using precise movements to ensure precise alignment of the wafer within the machine. The tool changer assembly is responsible for changing any necessary parts or components that may be needed during the etching and ashing process. CPX is a computer-controlled etching and ashing system which is part of STS / CPX and allows for precise control over every aspect of the etching and ashing process. This includes precise control over temperature, pressure, as well as flow rate, power and timing. STS is designed to provide high Quality Etching and Ashing results by using an advanced software interface to optimize and control the parameters of the etching. STS Multiplex combines the precision of an CPX tool changer with a Computer-Aided Plasma Etching Process to create an etcher that is capable of achieving exceptional results in etching and ashing. The etcher is capable of achieving high repeatability and accuracy for a wide variety of substrate materials and processes. It also has the ability to be easily reconfigured to suit specific application requirements, making it an ideal choice for those who need to achieve reliable, accurate and repeatable etching results.
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