Used TECHNICS Micro RIE Series 800-II #9303728 for sale

ID: 9303728
Reactive Ion Etcher (RIE).
TECHNICS Micro RIE Series 800-II is a state-of-the-art etching and ashing machine ideal for precision etching and ashing in the microelectronics industry. Micro RIE Series 800-II is equipped with a 5" diameter by 5-2/5" (125 mm) exposure window and features advanced stage control with movement, scanning and base curves. The base of the equipment is constructed with high-performance conductive graphite insulation isolating for superior temperature control down to 1°C and a quartz sealed exhaust port to prevent contamination. TECHNICS Micro RIE Series 800-II also features an advanced bond correlator software package and an intuitive graphical user interface, allowing for precise process control. Micro RIE Series 800-II is equipped with a quenching pressure controller feature, allowing for precisely controlled and repeatable process settings for optimal etching or ashing. The system is also capable of controlling up to three gases simultaneously for precision etching and ashing. The high-throughput high-frequency plasma generator features a level of power as low as 1W, for excellent control during sensitive, small-area processes. The rapid 4-step process ensures a high-quality process, allowing for complete ashing with only a few seconds of exposure. TECHNICS Micro RIE Series 800-II is composed of quality materials and components for maximum precision and accuracy. The unit is powered by a single-phase 0.2 kW motor control machine with a voltage of up to 220V. The advanced controllers also feature PI control, for the adjustment of exposure and pressure in real-time during ashing. Micro RIE Series 800-II also offers a variety of safety features, including an emergency shut-off feature, to ensure users are always safe. The high-performance, corrosion-resistant plasma generator has a processing interval as short as 0.1 second, ensuring accurate etching. TECHNICS Micro RIE Series 800-II is perfect for use in the microelectronics industry. The 5" by 5-2/5" (125 mm) etcher / asher is ideal for precise, rapid etching and ashing. The tool features accurate and repeatable process settings, advanced stage control, and an intuitive graphical user interface. Its rapid 4-step process, single-phase 0.2 kW motor control asset, and high-throughput high-frequency plasma generator make Micro RIE Series 800-II a top choice for microelectronics etching and ashing.
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