Used TEGAL 803 #201078 for sale

TEGAL 803 is an advanced etcher / asher designed for a variety of specialized processes. This specialized etching platform is ideal for a variety of processes, including, but not limited to, wet etching of complex structures, oxide etching, high aspect ratio photonic and plasmonic microstructures, and dry etching. This technologically advanced equipment is available through TEGAL Corporation, a leading supplier of custom etch and asher systems, worldwide. 803 features a vertical chamber design which allows it to process substrates up to 8 inches in diameter. This system is equipped with the unique Etch Wizard II control unit, which provides simple and intuitive control over the etching and emission process. The Etch Wizard II also allows users to interact with the machine remotely, making operation and maintenance much easier and more convenient. TEGAL 803 also provides two additional control systems - the Touch Wizard and the Digital Etch Selector (DES). The DES control tool allows users to precisely control their etch process parameters such as pressure, time, and power. 803 also offers a wide range of features designed to maximize the etching and emission process. The asset is capable of supporting both hot and cold substrate processing, depending on the desired process parameters. Additionally, it is also capable of supporting a broad range of etching gases and etch chemistries, including wet etch formulas for both oxide and metallic materials. The emission process is also adjustable, allowing users to customize their emission profile to optimize their processes. TEGAL 803 also boasts advanced safety features. Most notably, the model is equipped with TEGAL Shield Leak Detection Equipment, which is designed to quickly and accurately detect any hazardous gases that may pose a risk during etching. Additionally, the system is also equipped with a variety of inerting systems, designed to further prevent any potential gas leaks. 803 is an advanced etching platform that is able to quickly and accurately etch a variety of complex structures. This advanced etching platform is supported by a variety of intuitive and precise control systems, as well as enhanced safety features. With its unique design, advanced features, and reliable performance, TEGAL 803 is an ideal choice for specialized etching processes.