Used TEGAL 803 #9260044 for sale

TEGAL 803 etcher is a multi-process etch equipment designed for high-volume industrial applications. Its high efficiency and low cost make it an attractive option for a variety of tasks. 803 is a fully automated single chamber process etcher with a vacuum chamber capacity of 8.4 liters and a working pressure of up to 0.1torr. It is equipped with a RF bias power supply as well as a microwave power supply for different etching processes. It also has two quartz etching plates, a plasma generating device, and a source for resistive materials. The system also includes a special-purpose high precision computerized die attach unit to precisely affix the RF generator and bias power supply to the etching plates prior to substrate introduction into the chamber. The computerized die attach machine facilitates precise and repeatable etch process conditions and provides uniformity across all wafers placed in the chamber. TEGAL 803's precise and repeatable process control makes it ideal for the production of high quality small-line patterned substrates. It can etch substrates of up to 200µm in thickness, with a minimum etching pitch of 20 µm. The chamber temperature can be set to a maximum of 400°C. The tool also features a high-speed computerized single wafer loader, capable of loading up to 4 wafers per minute into the asset. The model's processor also contains wafer acknowledge algorithms to ensure maximized repeatability of etched processes as well as consistent process wafer to wafer. 803's onboard diagnostic suite further improves operational efficiency by monitoring the equipment's status and presenting alarm management functions. By reading system parameters, process conditions, and other unit values, it can often diagnose problems and guide users to corrective measures. In addition, TEGAL 803 includes an active pre-deposition machine, designed to prepare the surface of the wafer in order to maximize etch uniformity and precision. Other features include an automated cleaning tool to optimize asset performance and reduce downtime. 803 is designed to provide reliability and consistent high-quality etching in industrial, small-scale or research applications. Its advanced features and efficient operation make it an ideal choice for durable and high-performance etching.