Used TEGAL 901 #9071953 for sale

Manufacturer
TEGAL
Model
901
ID: 9071953
Wafer Size: 6"
Etcher, 6" With conversion, 4".
TEGAL 901 is a vacuum evaporation coater / etcher / asher. It is an automatic, high-temperature, high-precision instrument used for thin-film evaporative coating. Manufactured by TEGAL Corporation, 901 utilizes its patented source technology for wide-area uniform coatings. It features a single source for all deposition needs, allowing for the deposition of various materials, including metals, insulators, and thin films. TEGAL 901 is an up-to-date tool for thin film production, providing the advantages of high precision and high uniformity. Its uniquely designed chamber is equipped with a rotating platform, which allows for even and uniform deposition of thin films across a large area. This autonomous device can be used to deposit high-performance thin films with a wide range of applications. The instrument is comprised of advanced components and modules, such as a vacuum chamber, stainless steel crucible and body with a thermally conductive surface. Other components include an automated control system, deposition monitor and a precise vacuum gauge. 901 also features an ultra light-weight and relatively small footprint, which allow for positioning alongside of other laboratory equipment and one-person off-site operation. TEGAL 901 is equipped with a powerful Vacuum N2 diffusion pump that provides a low background pressure of up to 10-6 Torr. An advanced, integrated process control system ensures consistent and accurate process performance. This precise system includes a robotic arm, trigger and monitor points, as well as advanced visualization tools. Additionally, the built-in deposition control programs are pre-configured for deposition of thin films such as; aluminum, titanium, silicon and other material types. 901 features an integrated design, allowing for precise and reliable coating of multiple substrates. Its thin film deposition capabilities offer a high degree of uniformity and repeatability, perfect for precision fabrication or research purposes. TEGAL 901 provides a variety of deposition speeds, to ensure adequate processing times, while its user-friendly, intuitive software allows for easy setting of parameters such as; temperature, cycle time and vacuum levels. Additionally, its ergonomically designed features make for safe, efficient handling and operation. Overall, 901 is an efficient, easy to use and highly configurable evaporative coater, providing outstanding, uniform thin film deposition results. With a wide range of deposition materials, integrated process control and ergonomic design, TEGAL 901 fulfills all the requirements for a reliable and successful thin-film production or research project.
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