Used TEGAL 901e #9196408 for sale

TEGAL 901e
Manufacturer
TEGAL
Model
901e
ID: 9196408
Wafer Size: 4"-6"
Reactive ion etcher (RIE), 4"-6" ENI ACG-10T RF Generator THERMO NESLAB M75.
TEGAL 901e is an advanced etcher/asher designed for use with etch resist developed specifically for use with MEMS and semiconductor fabrication processes. This device features a high powered pulsed laser with a wide range of variable parameters to suit a wide range of production runs. It can provide quick, accurate, and reliable etching of various substrates including copper, molybdenum, aluminum, silicon, polysilicon, oxide, and glass. TEGAL 901 E is designed for the precise and precise control of etch resist development. The device's high power laser allows for specific control of laser drift, length of exposure, and total etching time. Additionally, the device is equipped with a number of safety features to ensure safety during production runs. These safety features include an emergency stop button and an audible alarm system that sound off if the i-cable is disconnected or the laser reaches its maximum beam power. The device is also equipped with a digital control unit that includes an active power supply, laser emitter, optical fiber delivery fiber, and a computational processor. This combination allows for precise and consistent etching results. 901e also features ease of use and a low cost of ownership. The user can quickly change parameters and reprogram the device without any additional time or money. Additionally, the device is designed to work with a range of etch resists from Kodak, Photopat, and Positive. Additionally, the device is compatible with a number of standard thickness wafers, thus allowing for a range of production runs. In conclusion, 901 E is a versatile and reliable etching/ashing device designed for the precise etching of a variety of substrates. Its high power laser, safety features, and digital control unit make it a valuable tool for the semiconductor and MEMS industries. Additionally, its ease of use and low cost of ownership make it an ideal solution for production runs of all sizes.
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