Used TEL / TOKYO ELECTRON 8500PE #9113041 for sale

TEL / TOKYO ELECTRON 8500PE is an etcher and plasma asher machine designed to ensure accurate control and precision patterning during the etching process. Featuring a three-axis CNC motion control system, TEL 8500PE is specifically engineered to provide high-quality results across a wide range of sample sizes. TOKYO ELECTRON 8500PE produces anodized etching patterns using a combination of photoresist and anodic etchy techniques. 8500PE supports precision repeat accuracy up to 5 µm for larger size wafers, with evenness ranging from +/- 0.02 mm. This provides consistent etching results even on the most precise devices and substrates. TEL / TOKYO ELECTRON 8500PE relies on a combination of either high-frequency capacative coupling, independently segmented RF induction, or PECVD (plasma-enhanced chemical vapor deposition) control for the plasma source power control. For additional UFD (uniformity & feature density) control, TEL 8500PE is also able to employ simultaneous bias and substrate bias resources. TOKYO ELECTRON 8500PE boasts an extremely low particle loading, and is able to achieve exhaust rates of up to 12 CFM (cubic feet per minute). The lowest temperature achieved by the etching chamber is approximately 10°C, offering flexible and efficient operation for a variety of substrates and applications. 8500PE is designed for easy and safe operation, boasting several safety features. In addition to a vacuum viewing port for observation, TEL / TOKYO ELECTRON 8500PE can be equipped with a remote access console, allowing users to monitor and adjust process parameters from a distance. Overall, TEL 8500PE is an ideal choice for precision etching and plasma ashing processes. Its single-wafer compatibility, three-axis CNC motion control system, and variable bias and substrate bias capabilities provide a truly comprehensive etching capability. Moreover, TOKYO ELECTRON 8500PE's enhanced safety features ensure optimal security and protection during operation.