Used TEL / TOKYO ELECTRON Formula-1S-H #293625497 for sale
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ID: 293625497
Vintage: 2005
Diffusion furnace
Control system
Heater temperature: 600°C-900°C
Load port
FIMS
Wafer transfer
Boat elevator / Seal cap rotation
Auto shutter
Heater model
N2 Load lock
Boat operation
Process: LPCVD
Si SEMI STD-Notch, 12"
Furnace temperature controller: M780
HTR
Power box
Carrier transfer
Mechanical driver
Exhaust box
Front and rear upper cover
Final valve box
Gas flow chart
O2 Analyzer
Hard Disk Drive (HDD)
Does not include HCT
User interface:
MMI and gas flowchart: Gas box and front operation panel installed
Pressure display Unit: Mpa / Torr
Carrier type: FOUP / 25slots SEMI STD
Fork meterial: Al203 and PEEK
W/T Type: 1+4 Edge grip
16-Carrier stage capacity
Wafer notch aligner
RCU
UPS
Power distribution system:
3-Phase connection type: Star connection
Single-Phase connection: Grounded
Single-Phase voltage
Gas distribution system:
FUJIKIN Integrated Gas System (IGS)
IGS Final filter, regulator: MFC Z500 Type
MKS Capacitance manometer vacuum gage - press monitor (133 Kpa)
Power supply: 400 VAC, 3 Phase, 50/60 Hz
2005 vintage.
TEL / TOKYO ELECTRON Formula-1S-H is a one-chamber, computer-controlled etcher/ asher. It is designed to provide high precision results when etching and ashing process in microfabrication and semiconductor applications. The equipment is equipped with multiple options and comprehensive features to ensure accuracy and repeatability of the process. The main component of TEL Formula-1S-H is the etching/asching chamber. It is constructed from stainless steel and has a maximum capacity of 600 liters. Inside the chamber, a source gas is introduced and a vacuum atmosphere is maintained for precise etching and ashing process. The temperature inside the chamber is also regulated via a precise electronic temperature controller. The precise control of the temperature ensures precise results as well as repeatability of the process. The system also provides several optional accessories to enhance the process. It can be equipped with a water chiller to prevent cross contamination and provide precise control of the process. For better resolution, a secondary platen can be added to the unit for precise etching at higher resolution. A rollover plate is also available for precise vertical etching. TOKYO ELECTRON Formula-1S-H has several advantages: it is simple to use and offers precise results; it is versatile, allowing different parameters to be adjusted according to the requirements; it is compatible with different etching and ashing parameters, including high-density etching; and its safety features ensure minimal exposure to hazardous gases. The machine is easy to integrate into existing production line. It can be connected to a computer to provide process data, monitor the process and ensure repeatability of results. It also can be integrated with other systems such as SEM, AFM, and wafer steppers to further increase process efficiency. Overall, Formula-1S-H is a reliable and precise etcher and asher. Its high performance and a number of additional features make it the perfect choice for various microfabrication and semiconductors applications.
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