Used TEL / TOKYO ELECTRON Formula-1S-H #293654964 for sale
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ID: 293654964
Vintage: 2006
Diffusion furnace
Control system
Heater temperature: 600°C-900°C
Load port
FIMS
Wafer transfer
Boat elevator / Seal cap rotation
Auto shutter
Heater model
N2 Load lock
Boat operation
Process: LPCVD
Si SEMI STD-Notch, 12"
Furnace temperature controller: M780
HTR
Power box
Carrier transfer
Mechanical driver
Exhaust box
Front and rear upper cover
Final valve box
Gas flow chart
O2 Analyzer
Hard Disk Drive (HDD)
Does not include HCT
User interface:
MMI and gas flowchart: Gas box and front operation panel installed
Pressure display Unit: Mpa / Torr
Carrier type: FOUP / 25slots SEMI STD
Fork meterial: Al203 and PEEK
W/T Type: 1+4 Edge grip
16-Carrier stage capacity
Wafer notch aligner
RCU
UPS
Power distribution system:
3-Phase connection type: Star connection
Single-Phase connection: Grounded
Single-Phase voltage
Gas distribution system:
FUJIKIN Integrated Gas System (IGS)
IGS Final filter, regulator: MFC Z500 Type
MKS Capacitance manometer vacuum gage - press monitor (133 Kpa)
Power supply: 400 VAC, 3 Phase, 50/60 Hz
2006 vintage.
TEL / TOKYO ELECTRON Formula-1S-H is an etcher/ashe that specializes in precision microfabrication processes used in semiconductor device manufacturing. It is a single manufacturing platform with a highly versatile tool set that provides the capability to etch, clean and planarize back-end-of-line (BEOL) layers and advanced structures. The machine is designed to offer a high degree of flexibility while enabling high productivity levels. The equipment is used in advanced microelectronics manufacturing and is capable of handling a wide range of microstructures, ranging from simple shadow masks to high-density devices with complex structures. TEL Formula-1S-H is capable of etching and cleaning at high throughput levels and is equipped with a full suite of automated features that ensure accuracy and reliability. It features an integrated cleaning system that can accommodate both wet and dry processes required for back-end-of-line layers. It has an advanced CAD unit for precise alignment and motion control. The machine has sophisticated process control software that allows for real-time feedback and adjustment of parameters to ensure yield. TOKYO ELECTRON Formula-1S-H is designed for high throughput and repeatability. Its modular architecture and user-friendly graphical control software allow for easy process setup. It also has a secure interface to enable secure, remote access for maintenance and programming purposes. The tool is also equipped with a programmable logic controller for automated operation and enhanced device protection. The asset also has built in safety features and protections, such as temperature and pressure sensors, fire, and gas detection systems, as well as process monitoring. The model has a low temperature geometric etch capability that reduces residual stress and distortion on delicate substrate structures. It also has an optimized deposition process that reduces particle contamination to ensure the highest performance. Formula-1S-H is designed to meet the standards of the international semiconductor production industry. It is an industry-leading etching and ashing equipment that is versatile and reliable. It offers excellent performance and accelerated microfabrication growth. The system is designed to be easy to use, flexible and cost-efficient. This makes TEL / TOKYO ELECTRON Formula-1S-H an ideal choice for the high-precision microfabrication needs of modern semiconductor device manufacturing.
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