Used TEL / TOKYO ELECTRON TELFORMULA ALD High-K #293638696 for sale

TEL / TOKYO ELECTRON TELFORMULA ALD High-K
ID: 293638696
Vertical LPCVD furnace.
TEL / TOKYO ELECTRON TELFORMULA ALD High-K is an etcher/asher that delivers uncompromising accuracy, repeatability and throughput for critical device processing. This etcher is a highly automated, fast, multi-station equipment designed for superior performance in production-volume semiconductor devices. With a patented, ultra-narrow anisotropic sputter transfer process and a double beam high-throughput etcher, TEL FORMULA ALD High-K provides the highest levels of accuracy, repeatability and top-tier throughput. The system's distributed computing architecture provides a flexible tool-factory environment that is balanced for responsiveness, throughput and cost. The proprietary design of the unit's processing engine provides users a high-level of control and the capacity to customize process recipes with the widest range of process combinations. The machine also supports numerous substrate formats, including 200mm and 300mm wafers. With the ALD High-K, engineers have the freedom to craft unique performance profiles without sacrificing accuracy, throughput, repeatability or stability, thanks to the tool's massively parallel architecture. The ALD High-K is compatible with various measures of environmental control conventions, integrates various wafer types and sizes for an optimized processing experience, and is powered by a multi-core processing architecture. The ALD High-K's transport and handling asset allows for the deepest process integration, from surface preparation through deposition. The automation process minimizes the delays and disruptions caused by substrate handling while significantly improving throughput, accuracy and repeatability. The model's exceptional balance control reduces the chance of disturbed substrates. With the ALD High-K, engineers can process layers a few nanometers thick or thicker with greater precision and throughput. In short, TOKYO ELECTRON TEL / TOKYO ELECTRON FORMULA ALD High-K is an etcher/asher of unparalleled accuracy, repeatability and throughput. This equipment offers flexibility and the ability to customize recipes with unparalleled control, ensuring superior device processing and the highest levels of productivity.
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