Used TOKYO OKA / TOK OPM A 1200 #162892 for sale

TOKYO OKA / TOK OPM A 1200
ID: 162892
Plasma asher, 4".
TOKYO OKA / TOK OPM A 1200 is a plasma etcher, manufactured by Tokyo Ohka Kogyo Co., Ltd. (TOK). It is designed for the selective etching of thin metal films and wafers, with a repeatable low cost of ownership. This etcher is based on a magnetron sputter process, which uses high-energy electric fields to produce ions that are subsequently accelerated towards the substrate to be etched. TOK OPM A 1200 features a 24" sputter chamber, with a precise and automated shielding pattern control, fully vacuum-sealed It has a precise and automated control of the etching process, including the RF power, masking, rate and shielding pattern. The software includes a variety of features, such as parameter optimization, data monitoring and logging, and playback storage. The equipment also supports full-lithography etching from GDSII, Gerber, or bitmap data formats. TOKYO OKA OPM A 1200 etcher has an ultra-high throughput, allowing for fast turnaround times and low cost etching. It has an auto-align system for precise mask alignment, as well as a multi-zone cooling unit that keeps the process temperature well within acceptable limits. Additionally, it has an automated wafer heating and cooling process, which helps maintain uniformity during the etching of the thin metal films. OPM A 1200 is a highly efficient etching machine with a wide range of features and capabilities. Its precise and automated control of the etching process, as well as its cost-effective design, makes it an excellent choice for reliable and precise thin metal etching. With its high throughput and excellent precision, TOKYO OKA / TOK OPM A 1200 is an ideal choice for consistent and accurate thin metal etching.
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