Used TOKYO OKA / TOK TCA-2400 #9396127 for sale

TOKYO OKA / TOK TCA-2400 is an etching and ashing equipment designed for industrial applications. The system is capable of chemical and dry ashing, and can process various materials from standard susceptors to wafers and other products. The unit includes a 300mm wafer support cassette, a 24-slot wafer magazine, and a rectilinear stage that can move the wafer into desired positions. The dual zone resistance furnace is capable of performing both thermal processes and chemical ashing reaction. It offers high temperature control and repeatability with an adjustable heating rate. TOK TCA-2400 utilizes a gas mixture machine that allows rapid adjustment of the process gas while providing accurate and precise process parameters. TOKYO OKA TCA-2400 boasts a temperature range of between ambient to 2400°C for ashing up to 1µm feature size with repeatable and reliable process results. It utilizes a gas mixture tool that includes both charge and relief gas for precise regulation of the processing gas to ensure accurate results. The asset also includes several safety features such as pressure and temperature monitoring to protect the operator and the surrounding environment. TCA-2400 is made of durable stainless steel and features a highly insulated construction for excellent thermal performance. It is specifically designed for high production of quality results with reduced material consumption. Its user-friendly LCD control panel and automatic self-calibration functions allow simple and efficient operation. Additionally, the model is equipped with a remote self-diagnosis capability and communication capability to allow remote monitoring and control of the process. Overall, TOKYO OKA / TOK TCA-2400 is a versatile and reliable etching/ashing equipment that delivers superior performance for applications requiring precision and accuracy. The system is highly reliable, easy to operate and maintain, and provides excellent process repeatability and reliability. It is ideal for a wide range of industrial applications and can process multiple materials with reliable results.