Used ULVAC UNA-2000 #293616239 for sale

ULVAC UNA-2000
Manufacturer
ULVAC
Model
UNA-2000
ID: 293616239
Ashers.
ULVAC UNA-2000 is a chemical etcher and asher, suitable for a variety of applications. It is designed for handling small to mid-sized substrates in a workshop or production environment. UNA-2000 provides a number of features and capabilities, including the ability to etch a variety of substrates, such as silicon wafers, glass, sapphire, quartz, and metals. It has a four-chamber equipment, providing a dual etch and ash process, as well as a chamber for pre-treatment and post-treatment, and an isolation chamber. The isolation chamber helps keep chemical processing agents (CPAs) used in etching and ashing processes away from other chambers, improving dramatically the device's durability and increasing system availability. ULVAC UNA-2000 features a modular design, allowing for easy set-up and maintenance. It has a 9-zone process temperature control unit and a nozzle that is capable of achieving high-speed, high-precision etching. It also features a pre-treatment chamber for controlling residual impurities on substrates, providing higher yields and better etching quality. UNA-2000 further features a fully automated, touch-panel display, providing easy-to-use, menu-driven user interface. Programmable control parameters can be customized to process recipes, which can later be stored and recalled from memory. The passivation chamber of ULVAC UNA-2000 can be connected to a vacuum line, enabling dry-resist film removal and cleaning. The chamber is also fitted with an exhaust port to evacuate the built-up CPAs. UNA-2000 is an effective and adaptable etcher/asher machine, suitable for a wide range of applications. Its modular design makes installation, maintenance, and operation convenient. Its precise process temperature control, high-precision nozzle, and automated menu-driven user interface ensures precise and consistent etching and ashing results. For enhanced durability and improved process accuracy, ULVAC UNA-2000 equipped with an isolation chamber, passivation chamber and exhaust port, making it an ideal option for a variety of etching and ashing processes.
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