Used CANON MPA 500 Fab #9144945 for sale

CANON MPA 500 Fab
Manufacturer
CANON
Model
MPA 500 Fab
ID: 9144945
Wafer Size: 4",5"
Mask aligners, 4" and 5".
CANON MPA 500 Fab is an advanced mask aligner that provides quality and repeatable contact printing of photosensitive resists. This equipment offers state-of-the-art technology for photolithography processing, allowing for the transfer of patterns from a mask to a substrate. The key features of CANON MPA 500FAB include a high speed, high precision multi-pixel thickness motion unit, an auto-corrected cold arc imaging system, precision alignment for contact printing, an ergonomic substrate alignment, and compatibility with various resist materials. In addition, this mask aligner offers process integration and fine feature alignment, automated electrical test printing, a reduction of misalignment between layers, and an easy-to-use user interface. MPA-500FAB is designed for advanced contact printing tasks and fine-pitch alignment. With a resolution of 5 microns and a motion unit capable of moving the substrate at intervals of one-thousandth of a pixel, CANON MPA 500-FAB provides superior accuracy for production stage contact printing. The design of the ergonomic substrate alignment allows for quick and precise alignment of the substrate, reducing the production times while keeping high accuracy. The substrate alignment unit enables parametric control of the substrate position using coordinates, enabling automated fine- and coarse-pitch alignment for contact printing. MPA 500 Fab offers compatibility with various resists, including photoresist, organic-free resin, and conductive oxides, as well as various substrate materials such as glass, quartz, andSi wafers. The machine enables accurate pattern transfer with the use of a variety of mask technologies such as binary, attenuated trapezoidal, and antialiased images. CANON MPA-500FAB also features an advanced autocorrected cold arc imaging tool that facilitates high-resolution imaging for fine feature resolutions. This imaging asset can be used for contact printing as well as direct imaging to produce fine patterns on various substrates. The auto-corrected cold arc imaging model ensures uniform illumination and improves the straightness of the patterns. In addition, MPA 500FAB includes integrated process control and sensor diagnostics, allowing for efficient production process management. These equipment features provide consistent and repeatable feature alignments with high accuracy. MPA 500-FAB is designed to provide superior quality, repeatable, and accurate contact printing for advanced electronic device fabrication tasks. This system provides a variety of benefits, including enhanced process integration and fine feature alignment, automated electrical test printing, and compatibility with a range of resist materials and substrates.
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