Used KARL SUSS / MICROTEC MA 6 #293626982 for sale

ID: 293626982
Vintage: 2000
Mask aligner 2000 vintage.
KARL SUSS / MICROTEC MA 6 is a high precision mask aligner designed to be used in various fabrication processes of flat panel displays, optical, MEMS and other similar applications. The equipment uses a unique alignment system that combines high accuracy laser alignment and beam-on sensors for precise registration and alignment. MICROTEC MA6 utilizes a software driven optical alignment unit which offers access to a wide range of operations. With its advanced software, the mask aligner can be configured to perform several operations including wafer to mask alignment and measurement, binary optical veiling, pattern projection alignment and correction and more. KARL SUSS MA-6 has two stages, a mask stage and a wafer stage. The mask stage provides three independent actuators with a maximum of 50 micron positioning. The wafer stage is equipped with high-precision XYZ-scanning and has a maximum Z-travel of 14 mm and XY-scanning range of 15 mm in each direction. The machine is capable of providing alignment accuracy of down to 5 microns in X and Y directions. Also included in KARL SUSS MA6 is a patented objective lens design that includes an adjustable focus and variable magnification. This ensures that the mask image is accurately focused onto the substrate. For increased safety and convenience, the tool includes a safety interlock asset to prevent accidental exposure. Additionally, the model includes a ergonomic design that reduces operator fatigue. MICROTEC MA 6 utilizes various components of modern optics and opto-mechanical engineering to provide reliable and accurate alignment and fabrication of flat panel displays, MEMS and other similar applications. This highly precise mask aligner is designed for reliability, performance and longevity, making it an essential component in the fabrication process.
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