Used SVG / PERKIN ELMER / ASML Micralign 600 #9357224 for sale

SVG/PERKINELMERSVG / PERKIN ELMER / ASML Micralign 600 Mask Aligner is a fully automated, high performance, alignment equipment that is used for hybrid photolithography applications. It is a lithography system that utilizes a multi-wavelength projection unit to project optically recorded patterns or shapes from a photomask onto a substrate. This allows for the fabrication of high precision semiconductor devices. Automated alignment and fast patterning performance make the machine ideal for applications such as industrial circuit production, medical device production, and semiconductor chip fabrication. The engine of the tool is a dual-wavelength projection alignment asset. It provides simultaneous illumination of multiple reference points located on the mask and substrate. Photomasks are mounted on a 6-axis aligner stage that provides fast and accurate alignment of mask patterns to the substrate. It uses a three-dimensional first-principle alignment approach, so that precise alignment is achieved at any point on the substrate. The model includes precision piezo stage drives, which are capable of delivering a positioning accuracy of 1 micrometer or better. SVG Micralign 600 includes a high precision patterning source, consistent illumination, and an advanced laser interferometer equipment for fine-tuning the pattern scaling and resolution. The combination of all these features results in significantly improved registration accuracy over legacy aligners. It is equipped with a variety of optional accessories and software programs for model data generation, alignment, and analysis. These optional system components allow for highly precise implementation of applications such as metrology, overlay alignment, defect inspection, printing residue analysis, etc. ASML/PERKINELMERASML Micralign 600 Mask Aligner is an advanced and effective unit that provides reliable accuracy for demanding photolithography applications.