Used HORIBA PD2-HR #9399895 for sale

HORIBA PD2-HR
ID: 9399895
Vintage: 2013
Mask particle detection system 2013 vintage.
HORIBA PD2-HR is a mask and wafer inspection equipment designed to analyze and inspect semiconductor devices which are fabricated through photolithography processes. It has been specifically developed to inspect defects that cannot be detected by conventional optical techniques or other electron imaging systems. The system consists of components including the vacuum chamber, control console, hardware, stage and scanner. The vacuum chamber houses the hardware components while the control console is used to enter inspection parameters and initiate the process. The stage houses the semiconductor wafer and is used to move the wafer according to the user-defined inspection process. Lastly, the scanner consists of the electron gun and optics, which focusses an electron beam onto the wafer surface. The electron beam operates in two modes: scanning and imaging. In scanning mode, the beam is rastered across the wafer to collect data related to the surface morphology, such as particle size, shape, depth and position. In imaging mode, the beam is tilted using deflection coils to take high resolution images of the wafer. PD2-HR uses an ultra-high resolution electron microscope to ensure critical defects can be detected. Its microscope resolution is 3x higher than conventional electron microscopes, meaning defects in advanced semiconductor technologies (20 nm nodes and thinner) can be detected quickly and accurately. Additionally, its automated computer-aided defect review unit makes it easy to view and score potential defects. The machine also has advanced data analysis capabilities and the ability to save and store images and data. It also has advanced inspection algorithms to identify and classify potential defect types including different types of particle contamination, scratches, corrosion, broken circuit lines and memory locations. In conclusion, HORIBA PD2-HR is a powerful mask and wafer inspection tool capable of detecting minute defects in advanced semiconductor devices. It has a high resolution electron microscope and automated computer-aided defect review asset, advanced data analysis capabilities, and the ability to easily save and store images and data. It is an ideal tool for a wide range of wafer inspection processes.
There are no reviews yet