Used AIT VRS-150 #293648371 for sale

AIT VRS-150 is a versatile and reliable wafer processing equipment designed to meet the needs of the most demanding semiconductor applications. This system includes a fully automated transfer station, as well as a state-of-the-art robotic arm, allowing it to easily manipulate each wafer through its various process stages. The robotics unit is further bolstered by several vision systems, which utilize proprietary algorithms to monitor the entire chip and wafer's progress. VRS-150 can process a wide range of wafer sizes and types, including 8-inch and 12-inch wafers. It can also accommodate a range of wafer thicknesses, ranging from 75 to 300 μm. This machine also has a maximum wafer temperature of up to 175°C, which is perfect for applications needing annealing or other high-temperature treatments. The tool's controller is an IBM compatible CPU, with two drives for both the onboard wafer handling software and the global specification package programs. The package program allows for the custom configuration of parameters for each step in the process, with both manual and automatic control available. The controller is further capable of online monitor and control, adjustments to processor performance, as well as alarms and error logging (in real-time). AIT VRS-150 also has a wide variety of process tools available. These tools include dry-etch accelerators, chemical vapor deposition (CVD) furnaces, ovens, and a variety of wafer-cleaning tools. Each tool is designed to not only produce high-quality products but also to minimize contamination risk. The CVD furnaces are further optimized to provide a low-temperature, low-pressure process, ideal for high-performance components. In sum, VRS-150 is a highly advanced and versatile wafer processing asset. Its easy-to-use controller, automated transfer station, robust robotic arm and array of high-tech process tools make it the perfect choice for a wide range of high-performance semiconductor applications.