Used DAIWA D0L-2810 #293643823 for sale

ID: 293643823
Vintage: 2000
System 2000 vintage.
DAIWA D0L-2810 Wafer Processing Equipment is a versatile and reliable system designed to provide advanced wafer fabrication capabilities. It is capable of handling a wide variety of wafer sizes and thicknesses and has excellent process repeatability. The unit has a load port capacity of 10-25 wafers per batch and an unload port capacity of 4-8 wafers per batch. The machine can process up to 250 wafers per hour. It offers a wide variety of wafer processing options such as the ability to carry out multi-step wafer processing including the deposition of dielectric layers, planarization, patterning and drilling. The tool's user-friendly interface simplifies operation and includes a built-in Process Wizard, which provides automated programming for users. It has a variety of process parameters that can be adjusted for different types of wafers and process conditions. This means that D0L-2810 can be configured to meet the specific needs of the user. The asset is equipped with a wet etch module and a high speed CMP module, both of which are designed for high throughput applications. The wet etch module is capable of handling differing etch chemistries and has adjustable etching parameters such as etch depth, flow rate and pressure. The CMP module is designed to planarize and refine high-aspect-ratio structures and can process multiple step thickness, while maintaining excellent surface uniformity. The model is equipped with several safety features such as an active safety guard, vacuum equipment protection and a built-in passive fire suppression system. It also comes standard with a motion control and sensors that alert the user to abnormal or unsafe conditions. DAIWA D0L-2810 Wafer Processing Unit is designed to be reliable and efficient and it is backed by a comprehensive customer service program. The machine also has a robust support network to ensure customers always have access to the latest information, support, and parts for their tool.
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