Used MKS Revolution Series #9103292 for sale

MKS Revolution Series is a complete, integrated production platform for other wafer processing. Designed for process control and process integration, Revolution Series offers superior performance and increased reliability in a range of configurations to meet the needs of today's evolving wafer processing. By combining the latest hardware, software and technologies, MKS Revolution Series platform provides end-to-end process control for all other wafer processing applications. Revolution Series features an integrated high-temperature rapid thermal processing (RTP) chamber for wafer state-of-the-art production. The platform offers unrivalled accuracy and reliability for applications requiring extremely precise wafer processing conditions and maximum throughput. The highly accurate data capture and process execution functions enable real-time monitoring of wafer process parameters and performance. MKS Revolution Series also provides advanced features for process optimization. Its multi-sensing process monitoring system provides accurate and comprehensive control over a range of process parameters. Revolution Series includes advanced memory management capabilities for rapid and reliable wafer operation. Its advanced temperature control mechanism ensures precise control over process temperatures, enabling tight temperature uniformity across all wafers in process. In addition, MKS Revolution Series is equipped with a high-power RF generator module for advanced plasma etching, laser ablation and masking treatments. Its fast switching RF power supply enables real-time power adjustment of up to 20 MHz, helping to optimize process control and optimize wafer performance. Revolution Series features a unique, high-precision optics toolset with various lenses and stages for accurate alignment during wafer processing. The series' integrated, low-power laser offer superior wafer engagement accuracy and high accuracy pulse control. The combined wafer-handling and processing system ensures maximum quality performance. MKS Revolution Series is the ideal platform for modern high-performance other wafer processing. Its powerful capabilities provide process stability and ultimate control for wafer processing applications. With its robust design and advanced features, Revolution Series enables higher yields and lower cost of ownership for other wafer processing.