Used ACCUTHERM AW 820 #9185471 for sale
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ID: 9185471
Wafer Size: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
ERP Pyrometer: 450°C-1250°C
With ±1°C accuracy
Thermocouple: 100°C-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with touch screen monitor, 15"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Isolated quartz tube without pyrometer window or with Pyrometer window
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas lines with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder for 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Options:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Stand alone
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C/1500°C
Temperature sensor: TC
Longest steady time @1000 °C: 30 mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Options:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 820 is an efficient electric furnace typically intended for use in ceramic applications, such as glassmaking, enameling and metalworking. This furnace is specially designed for maximum energy savings because of its advanced insulation and automatic temperature controls which help keep its temperature constant. This electric furnace is constructed from a stainless steel frame and is equipped with a silicon carbide-coated steel interior and stainless steel exterior. Additionally, this furnace is equipped with a special heat-resistant refractory brick lining between the steel interior and the stainless steel exterior which helps to keep the heat in and the electricity out. This furnace is also equipped with a forced air cooling equipment to ensure it is kept in optimal temperature conditions. AW 820 makes excellent use of technology to ensure its energy efficiency. Its state-of-the-art electric control system manages all of its thermal functions and energy consumption management. This electric control unit includes a touch-screen LCD panel that can be used to monitor temperature and energy usage, as well as set the desired working temperature. Additionally, there is a built-in energy-saving timer that can be used to set the desired start and end times for each work cycle. ACCUTHERM AW 820 is designed to reach temperatures up to 820°C, with a temperature uniformity of ±3°C. It is designed with an operating temperature of 0°C to 1100°C and features a rated power of 18.4 kW with a 230V single-phase power input. AW 820 is designed for easy and safe operation. Its integral safety features include a thermocouple effect-activated safety device, as well as a spring-loaded safety interlock that is designed to prevent unauthorized access to the furnace. Additionally, its mesh door is equipped with a limit switch that will shut off the power to the furnace when it is opened. The furnace also comes with an alarm machine that will alert the user to any unsafe operating conditions. ACCUTHERM AW 820 is well designed, energy-efficient electric furnace which provides maximum energy-efficiency, good temperature uniformity and good safety features, making it a great choice for operations requiring ceramic processes.
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