Used EATON XL622B #9180693 for sale

Manufacturer
EATON
Model
XL622B
ID: 9180693
Coater / Developer system.
EATON XL622B is a high-performance, high-precision photoresist equipment designed for wafer-level photoresist coating of a wide variety of monocrystalline semiconductor substrates. The system is built to provide precision and repeatability in a controlled environment. XL622B utilizes a liquid-level monitoring unit to help users obtain high quality coatings with repeatable results. The machine contains a vapor disperser, liquid-level monitor, resist-heating block, and resistance-measuring device. These components work together to create uniform, consistent, and repeatable coating thickness and patterning of photoresists across substrates. The vapor disperser delivers precise and responsive flows of photoresist vapors to the substrate. This ensures that the photoresist is delivered to the desired area without high areas of adherence or low pockets of voids in the photoresist layer. The liquid-level monitor helps users maintain a consistent coating thickness by constantly measuring the thickness of the photoresist as it is applied. The resistance-measuring device then monitors and records the electrical resistance of the photoresist during the coating process. This provides users with information about the overall quality of the photoresist layer as it is being applied. The resist-heating block further helps with uniform delivery of the photoresist by enabling uniform and repeatable heating of the photoresist across the wafer. The ability to make accurate and repeatable measurements of the photoresist layer combined with the precise delivery of consistent resist vapors and uniform heating of the photoresist layer enables EATON XL622B to create high quality coatings with excellent repeatability results. This allows users to create consistent wafer-level photoresist layers with high quality and minimal variation.
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