Used ELS TECHNOLOGY ELS3604FA #9156774 for sale

ELS TECHNOLOGY ELS3604FA Photoresist equipment is a state-of-the-art system for photolithography processes. This unit is suitable for a wide range of applications including fine line IC device fabrication, small and large area metallization and passivation processes. This machine features four optical channels and four independent control systems that can independently control exposure parameters like exposure power, exposure time and focus position. The tool also has a 4x4 laser stage, a 4-channel exposure head and a vertically integrated imaging asset. ELS3604FA features a full HD resolution, and a wide range of magnification factors up to 1500x. It can achieve exposure resolutions of up to 1 micron and exposure times of up to 30 minutes. It also has two "M1" and "M2" laser sources, with wavelengths of 532nm and 405nm, and can operate in both additive and subtractive exposure modes. The model also utilizes a liquid-based photoresist coating equipment, so coatings can be tailored to fit a variety of different substrates and applications. ELS TECHNOLOGY ELS3604FA is highly accurate and repeatable. Its motorized stages and automation system ensure repeatable and accurate results, enabling more efficient throughput and quality control. Additionally, its built-in vision unit ensures that alignment and critical-dimension checks can be done quickly and accurately, improving productivity. The machine also features several advanced features, such as the ability to produce continuous exposure fields and overlapping multiple exposure fields for larger substrates, increased depth of focus, and a "Molecular Photomask" feature that can provide precise control of exposure patterns. In conclusion, ELS3604FA Photoresist tool is an advanced, state-of-the-art asset suitable for many photolithography processes. Its automated and precise features enable efficient and accurate processing, ensuring repeatable and high-quality results.