Used LUNG PIEN LP-1500 EBA #293642696 for sale
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ID: 293642696
Vacuum coater
Diameter size: 1500 mm
Fixture size: 1400 mm
Ultimate vacuum: 10^-7 Torr / 10^-5 Pa
Maximum substrate temperature: 350°C
Cooling water flow: 150 Liters/min
Air compressor: 3~5HP
Air pressure: 6-8 Kg/cm²
Grounding resistance: <5 Ohms
Exhaust system:
Rotary pump: 5,000 Liters/min
Strengthen pump: 1,500 M³/hour
Diffusion pump: 45,000 Liters/sec
Ultra low temperature freezers: -110°C ~ -140°C
Heating system:
Micro heater: 36 kW
Film thickness gauge:
Optical film thickness meter: LP Film thickness meter wide wave region
Quartz film thickness meter: Monolithic sensor head / six sensing head
Vacuum gauge:
Pirani+Cold cathode (1ATM~ 10^-9 Torr / 1ATM~ 10^-7 Pa)
Evaporation source:
JEOL / PLASMATECH Electron gun, 6 kW / 10 kW / 15 kW
Resistance heating: 6 kW
Cooling tower:
Pressure: 4 Kg/cm²
Pressure: 2 Kg/cm²
Power supply: 80 kW.
LUNG PIEN LP-1500 EBA Photoresist Equipment is designed to meet the requirements of advanced packaging processes in the microelectronics industry. The system is a fully programmable, automated manufacturing solution using proprietary technologies to develop, process, and produce the highest quality photoresist layers required for the most precise surface treatments. Its unique design allows for precise layer thickness adjustment, improved adhesion, and exact cure control. LP-1500 EBA enables precise measurements in almost any environment, allowing users to achieve precise surface treatments. It is fully equipped with an automated unit for precise control over the specific parameters of each layer. This includes layer thickness, adhesion, and cure control. LUNG PIEN LP-1500 EBA also incorporates advanced applier technology for the uniform application of photo resist layers. This enables users to quickly and accurately adjust layer thickness and shape, producing a defect-free, reshaped product. It also includes powerful digital imaging systems which provide unparalleled insight into the layer's exact surface treatment parameters. LP-1500 EBA has a robust, full-spectrum monitoring and diagnostic capabilities to ensure optimal performance, even in diverse production environments. It can detect any variations in layer thickness and uniformity of each layer in real-time, making it easy to correct errors on the fly. The integrated optics can operate even in the presence of turbulent flow, providing complete flexibility and agility during in-process development. LUNG PIEN LP-1500 EBA is built to work with multiple operations, allowing users to make changes during the production process, preventing costly waste and ensuring the highest quality of finished products. LP-1500 EBA is a highly reliable and user-friendly machine able to meet the highest standards of precision and accuracy. Its combination of sophisticated technologies, high-precision components, and robust design make it an ideal solution for advanced packaging processes.
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