Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9197300 for sale

TEL / TOKYO ELECTRON Clean Track ACT 12 equipment is a groundbreaking photoresist system designed for leading edge lithography processes. The Clean Track ACT is a comprehensive integrated unit that provides critical cleaning processes and solutions for the most extreme lithographic requirements. TEL Clean Track ACT 12 machine utilizes deterministic transport that creates a clean environment for the active layer of a photoresist. This ensures that photoresist is deposited on the wafer uniformly, which is critical for the lithography process. Its advanced airlock technology provides a vital layer of protection against contamination and post-processing effects. This tool's integrated sequence of multiple cleaning and soft-bake processes ensures optimal conditions for lithography. TOKYO ELECTRON Clean Track ACT 12 also features a cap-wafer transfer asset that minimizes particles, reduces contact contamination and eliminates wafer cleaning. The high-end automation of this model is designed for efficient and reliable performance, ensuring the uninterrupted flow of process solutions for improved throughput. Clean Track ACT 12 provides a multi-function platform for advanced pre-processing. It is designed to support multiple lithography processes, such as both EUV and ArF lithography. The integrated platform offers both pre-bake capabilities and cleaning for a range of wafer sizes and configurations. TEL / TOKYO ELECTRON Clean Track ACT 12 is a versatile platform for lithography. It provides excellent uniformity across substrates to ensure precise